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Glow discharge mass spectrometry (GDMS) is the state-of-the-art analytical technique for the bulk elemental analysis of inorganic solid samples. Glow discharge mass spectrometry is the most comprehensive and sensitive technique available for the analysis of solids. It is capable of analyzing, conducting, semi-conducting and insulating samples. It is amenable to solids, powders, crystals, wafers, and many other sample forms. Its elemental coverage encompasses lithium through uranium with the ability to determine impurity levels from the sub-ppb range to the percent level. The advantages of glow discharge mass spectrometry include total elemental coverage, high precision, low detection limits, quantitative accuracy (+25% on average), without the use of standards. High resolution capabilities eliminate most spectral interferences.

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